Photon Dynamics, Inc.

Photon Dynamics Canada Inc.

Werth Messtechnik Gmbh

Image Processing Systems Inc.

Wdi Wise Device Inc.

Alexandre Obotnine

Adam Weiss

Afsar Saranli

Oleksiy Lopatin

Eric Gurny

Andrew Lasinski

An optical sensor device () for use in a measuring and/or inspection apparatus comprises an optical sensor head () including a white light sensor () having a wideband radiation source (), a wavelength-sensitive receiver () and a beam splitting means (); and an objective () for directing a measuring beam onto an object to be measured and detecting a reflection beam reflected from the object to be measured. The optical sensor device () further comprises a video sensor (), wherein the beam path of the video sensor () passes through the same objective () as that of the white light sensor () of the optical sensor head ().

Optical sensor device

The invention is directed at a method and apparatus for auto-focusing an infinity corrected microscope. Light beams are directed and then converged towards a specimen of interest and at least one image is formed from the reflected light. The image, or images, are then reviewed and calibration measurements are retrieved from the image. These calibration measurement are then used to determine focusing measurements which are used to auto-focus the microscope.

Method and apparatus for the auto-focussing infinity corrected microscopes

In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering

Apparatus and a method for the detection and identification of light diverting and transparent defects with optical properties in a transparent medium. The apparatus has a light source with an aperture stop, a lens system focusing an image of the aperture stop at a plane, and means to pass the transparent medium through said column of light. The apparatus and method provide dark view images of the defects. The apparatus and method may be combined with a viewing area inspection system. The transparent medium may be curved, and especially face plates for cathode ray tubes.

Dark view inspection system for transparent media

Apparatus and a method for the detection and identification of defects in a transparent medium, especially light diverting and transparent defects with optical properties. The apparatus comprises an extended source of illumination, first and second optical recording devices, and a means to pass the transparent medium between the extended source of illumination and the first and second optical recording devices. The first and second optical recording devices are disposed to record images at opposed acute angles from a common location on the transparent medium. The second optical recording device has two sources of laser illumination attached thereto, which are directed at the common location in a spaced apart relationship such that scattered of laser light from surfaces of the transparent medium is recorded by the first optical recording device.

Stereo vision inspection system for transparent media

An inspection system for a sheet of glass. The system comprises a first laser and a second laser, each of which provide a sheet of light, a cylindrical lens system, and a first light detection system and a second light detection system. The first laser is located at the focal point of the lens system. The second laser is located at a distance from the lens system that is greater than that of the first laser, and off of the axis of the lens system. The first light detection system receives light from the first laser and the second light detection system receives light from the second laser. The inspection system is adapted to position a sheet of glass between the lens system and the detection systems. A method is also described.

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Toronto, Canada

Alexandre Obotnine