Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh

Aleksandra Kramer

Stefan Lanio

John Breuer

An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.

Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device

A method of compensating mechanical, magnetic and/or electrostatic inaccuracies in a scanning charged particle beam device is described. The method includes an alignment procedure, wherein the following steps are conducted: compensating 4-fold astigmatism with an element having at least 8-pole compensation capability, wherein the aligning and compensating steps of the alignment procedure act on a charged particle beam with beam dimensions in two orthogonal directions each of at least 50 &#x3bc;m and coaxially aligned with at least the element having at least the 8-pole compensation capability.

Growing community of inventors

Munich, Germany

Aleksandra Kramer