Fei Comapny

Albertus Aemillius Seyno Sluijterman

Eric Gerardus Theodoor Bosch

Cornelis Sander Kooijman

Gerard Nicolaas Anne Van Veen

Luigi Mele

Patrick David Vogelsang

Gerardus Nicolaas Anne Van Veen

Johannes Adrianus Carolus Cooijmans

A Transmission Charged-Particle Microscope comprises a source of charged particles which are then directed by an illuminator onto a specimen supported by a specimen holder. Charged particles transmitted through the specimen may undergo energy loss with a distribution of losses providing information about the specimen. A dispersing device disperses the transmitted charged particles into an energy-resolved array of spectral sub-beams distributed along a dispersion direction. The dispersed charged particles are detected by a detector comprising an assembly of sub-detectors arranged along said dispersion direction, whereby different sub-detectors are adjustable to have different detection sensitivities.

Method of performing spectroscopy in a transmission charged-particle microscope

A method of investigating a flux of output electrons emanating from a sample in a charged-particle microscope, which flux is produced in response to irradiation of the sample by a beam of input charged particles, the method comprising the following steps:

Charged-particle microscopy with enhanced electron detection

The invention relates to a charged particle detector system comprising a conversion plate () to convert incoming radiation to secondary electrons. These secondary electrons are then detected by a secondary electron detector (), thereby providing information of the incoming radiation. Often this information is limited to, in first approximation, the flux of incoming radiation. In the case of, for example, backscattered electrons this is the current of the incoming backscattered electrons. The invention proposes to form the conversion plate as, for example, an energy dependent detector, for example a photodiode to detect electrons, so that the detector system simultaneously provides information of, for example, current (S) and mean energy (S) of the incoming radiation. The detector system is especially suited for use in a SEM or a DualBeam apparatus.

Charged particle detector system comprising a conversion electrode

The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behavior of the surface layer the current induced by a scattered electron, e.g. holes, are divided over the electrodes, so that a current Iand Iis induced, the sum of the current proportional to the energy of the impinging electron and the normalized ratio a function of the radial position where the electron impinges.

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Eindhoven, Netherlands

Albertus Aemillius Seyno Sluijterman