Other

Sony Corporation

Akifumi Ooshima

Hiroyuki Wada

Nobuhiko Umezu

Koichi Tatsuki

Tadashi Hattori

Tetsuo Abe

Shigeo Kubota

Makoto Takatoku

Hiroyuki Tamaki

Ayumu Taguchi

Yukiyasu Sugano

Yoshimi Hirata

Yoshiyuki Noguchi

Eiji Isomura

Makoto Uragaki

Tomohiro Ishiguro

Masataka Ebe

Yasuyuki Kato

The state of a polysilicon film formed by excimer laser annealing an amorphous silicon film is to be evaluated. When the amorphous silicon film is annealed to form a polysilicon film, linearity or periodicity presents itself in the spatial structure of the film surface of the polysilicon film formed depending on the energy applied to the amorphous silicon during annealing. This linearity or periodicity is processed as an image and represented numerically from the image by exploiting the linearity or periodicity. The state of the polysilicon film is checked based on the numerical results.

Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor

A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion. To this end, there is provided a polysilicon film evaluation apparatus including a stage on which to set a substrate W carrying a polysilicon film, an optical system for observation with the visible light for illuminating the visible light on a substrate W on the stage to photograph a surface image of the polysilicon film on the substrate W to effect auto-focusing, an optical system for observation with UV light for illuminating the UV light on the substrate on the stage to acquire a surface image of the polysilicon film of the substrate, auto-focused using the optical system for observation with the visible light, and an evaluating unit for evaluating the linearity and periodicity of a spatial structure of the film surface of the polysilicon film, from a surface image of the polysilicon film obtained by the optical system for observation with UV light, to evaluate the status of the polysilicon film based on the results of evaluation of the linearity and periodicity.

Apparatus for evaluating polysilicon film

Growing community of inventors

Kanagawa, Japan

Akifumi Ooshima