Micron Technology Incorporated

Process Technologies, Inc.

Adam J Regner, Iii

Rita J Klein

Theodore S Weigold

John D Ferrell

An electroless plating composition comprising succinic acid, potassium carbonate, a source of cobalt metal ions, a reducing agent, and water is provided. An optional buffering agent may also be included in the composition. The composition may be used to deposit cobalt metal in or on semiconductor substrate surfaces including vias, trenches, and interconnects.

Electroless plating bath composition and method of use

A method of forming a sidewall for a reactor for oxidizing volatile or semi-volatile organic compounds, the sidewall being reactive with gaseous oxidation products produced by the oxidation of the volatile or semi-volatile organic compounds, includes, i) providing a dry mixture of material comprising by weight: from about 23% to 35% cement; from about 30% to 45% added CaO; from about 6% to 20% added Ca(OH).sub.2 ; and from about 10% to 25 % added CaSO.sub.4 ; ii) combining the dry mixture of material with water and forming a slurry therefrom; iii) forming the slurry into a desired reactor sidewall shape; and iv) hardening the shaped slurry into a hardened cement reactor sidewall.

Method of forming a sidewall for a reactor for oxidizing volatile or

A method of forming a sidewall for a reactor for oxidizing volatile or semi-volatile organic compounds, the sidewall being reactive with gaseous oxidation products produced by the oxidation of the volatile or semi-volatile organic compounds, includes, i) providing a dry mixture of material comprising by weight: from about 23% to 35% cement; from about 30% to 45% added CaO; from about 6% to 20% added Ca(OH).sub.2 ; and from about 10% to 25% added CaSO.sub.4 ; ii) combining the dry mixture of material with water and forming a slurry therefrom; iii) forming the slurry into a desired reactor sidewall shape; and iv) hardening the shaped slurry into a hardened cement reactor sidewall. An apparatus for photochemically oxidizing gaseous volatile or semi-volatile organic compounds includes a reactor vessel comprising sidewalls having at least one baffle. The baffle comprises at least a portion of the respective reaction chamber sidewalls with the baffle itself comprising the dry porous cementitious and chemically sorbent material. The baffle includes a peripheral frame which receives the cementitious material. The frame has a peripheral and inwardly facing channel member having at least two channel walls. The channel walls include at least one projection extending into the cementitious material. A source of ultraviolet light used to produce the oxidation products are U-shaped tubes. A cooling medium used to cool the baffle comprises tubing mounted to a substantially planar substrate.

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Meridian, ID, United States of America

Adam J Regner, Iii