Intel Corporation

Other

Intel Corporatiion

Abhishek A Sharma

Van H Le

Jack T Kavalieros

Gilbert W Dewey

Ravi Pillarisetty

Tahir Ghani

Prashant Majhi

Brian S Doyle

Willy Rachmady

Shriram Shivaraman

Elijah V Karpov

Ram K Krishnamurthy

Gregory Kengho Chen

Phil Knag

Huseyin Ekin Sumbul

Benjamin Chu-Kung

Bernhard Sell

Sasikanth Manipatruni

Ian A Young

Seung Hoon Sung

Raghavan Kumar

Wilfred Gomes

Travis W LaJoie

Amrita Mathuriya

Hui Jae Yoo

Yih Wang

Mauro J Kobrinsky

Pei-Hua Wang

Sean T Ma

Chieh-Jen Ku

Matthew V Metz

Nazila Haratipour

Urusa Alaan

Aaron D Lilak

Christopher J Jezewski

Arnab Sen Gupta

Kevin Lai Lin

Justin R Weber

Ashish Agrawal

Carl H Naylor

Allen B Gardiner

Noriyuki Sato

Cheng-Ying Huang

Fatih Hamzaoglu

Miriam Ruth Reshotko

Tristan A Tronic

Juan G Alzate Vinasco

Patrick R Morrow

Doug B Ingerly

Shem Ogadhoh

Sarah Atanasov

Charles C Kuo

Victor W Lee

Elliot Tan

Juan G Alzate-Vinasco

Rafael Rios

Rishabh Mehandru

Manish Chandhok

Roman Caudillo

Scott Bruce Clendenning

Blake C Lin

Kaan Oguz

Sanaz Kabehie Gardner

Ehren Mannebach

Sudipto Naskar

Uygar E Avci

Kevin O'Brien

Harold W Kennel

Anh Phan

Rajesh Kumar

Kevin Fischer

Marko Radosavljevic

Kimin Jun

Swaminathan Sivakumar

Cory E Weber

Rami Hourani

Russell Y Webb

Kinyip Phoa

Lawrence D Wong

Jerremy Holland

Tomas Jon Pfister

Nicholas Elia Apostoloff

Han Wui Then

Sansaptak W Dasgupta

Telesphor Kamgaing

James S Clarke

Jeanette M Roberts

Nicole K Thomas

Hubert C George

Sanka Ganesan

David L Kencke

Zachary R Yoscovits

Ilya V Karpov

Eungnak Han

Kanwaljit Singh

Nafees Kabir

Anup Pancholi

Gurpreet Singh

Ayan Kar

Huichu Liu

Embodiments of the present disclosure are based on using transistors with back-side contacts. Such transistors enable back-side power delivery to IC components (e.g., transistors, etc.) of an IC structure, which may be more advantageous than front-side power delivery in some implementations. Embodiments of the present disclosure are further based on recognition that using a glass support structure at the front side of an IC structure with back-side power delivery may advantageously reduce parasitic effects in the IC structure, e.g., compared to using a silicon-based support structure at the front.

Back-side power delivery with glass support at the front

Integrated circuit (IC) devices implementing bilayer memory stacking with compute logic circuits shared between bottom and top memory layers are disclosed. An example IC device includes a first IC structure that includes one or more memory layers but not necessarily compute logic circuits, the first IC structure being bonded with a second IC structure that includes at least one layer of compute logic circuits and further includes one or more memory layers stacked above the compute logic circuits. The first and second IC structures may be bonded so that the compute logic circuits of the second IC structure may be communicatively coupled to memory layers of both the first and second IC structures.

Bilayer memory stacking with computer logic circuits shared between bottom and top memory layers

Microelectronic assemblies fabricated using hybrid manufacturing with modified via-last process are disclosed. The fabrication approach is based on using hybrid manufacturing to bond first and second IC structures originally provided on different dies but filling at least portions of vias that are supposed to couple across a bonding interface between the first and second IC structures with electrically conductive materials after the IC structures have been bonded. A resulting microelectronic assembly that includes the first and second IC structures bonded together may have vias extending through all of the first IC structure and into the second IC structure, thus providing electrical coupling between one or more components of the first IC structure and those of the second IC structure, where an electrically conductive material in the individual vias is continuous through the first IC structure and at least a portion of the second IC structure.

Hybrid manufacturing with modified via-last process

Described herein are integrated circuit (IC) devices that include devices that include fin-based field-effect transistors (FinFETs) integrated over gate-all-around (GAA) transistors. The GAA transistors may serve to provide high-performance compute logic, and may be relatively low-voltage transistors, while FinFETs may be more suitable than GAA transistors for providing high-voltage transistors, and, therefore, may serve to provide peripheral logic for backend memory arrays implemented over the same support structure over which the GAA transistors and the FinFETs are provided. Such an arrangement may address the fundamental voltage incompatibility by integrating a mix of FinFETs and GAA transistors in stacked complimentary FET (CFET) architecture to enable embedded 1T-1X based memories.

Integrated circuit devices with FinFETs over gate-all-around transistors

An example IC device includes a frontend layer and a backend layer with a metallization stack. The metallization stack includes a backend memory layer with a plurality of memory cells with backend transistors, and a layer with a plurality of conductive interconnects (e.g., a plurality of conductive lines) and air gaps between adjacent ones of the plurality of interconnects. Providing air gaps in upper metal layers of metallization stacks of IC devices may advantageously reduce parasitic effects in the IC devices because such effects are typically proportional to the dielectric constant of a surrounding medium. In turn, reduction in the parasitic effects may lead to improvements in performance of, or requirements placed on, the backend memory.

Backend memory with air gaps in upper metal layers

Various aspects of the present disclosure set forth IC dies, microelectronic assemblies, as well as related devices and packages. One aspect relates to disaggregating 3D monolithic memory and compute functions to enable tight coupling for fast memory access at high bandwidth. Another aspect relates to microelectronic assemblies relate to nano-TSVs with 3D monolithic memory. Further aspects relate to die stitching and the use of glass carrier structures in microelectronic assemblies. Various aspects disclosed herein advantageously provide a robust set of implementations that may enable significant improvements in terms of optimizing performance of individual IC dies, microelectronic assemblies including one or more of such dies, and IC packages and devices including one or more of such microelectronic assemblies.

Integrated circuit assemblies

Integrated circuit (IC) assemblies with stacked compute logic and memory dies, and associated systems and methods, are disclosed. One example IC assembly includes a compute logic die and a stack of memory dies provided above and coupled to the compute logic die, where one or more of the memory dies closest to the compute logic die include memory cells with transistors that are thin-film transistors (TFTs), while one or more of the memory dies further away from the compute logic die include memory cells with non-TFT transistors. Another example IC assembly includes a similar stack of compute logic die and memory dies where one or more of the memory dies closest to the compute logic die include static random-access memory (SRAM) cells, while one or more of the memory dies further away from the compute logic die include memory cells of other memory types.

Integrated circuit assemblies with stacked compute logic and memory dies

A thin film transistor (TFT) structure includes a gate electrode, a gate dielectric layer on the gate electrode, a channel layer including a semiconductor material with a first polarity on the gate dielectric layer. The TFT structure also includes a multi-layer material stack on the channel layer, opposite the gate dielectric layer, an interlayer dielectric (ILD) material over the multi-layer material stack and beyond a sidewall of the channel layer. The TFT structure further includes source and drain contacts through the interlayer dielectric material, and in contact with the channel layer, where the multi-layer material stack includes a barrier layer including oxygen and a metal in contact with the channel layer, where the barrier layer has a second polarity. A sealant layer is in contact with the barrier layer, where the sealant layer and the ILD have a different composition.

Passivation layers for thin film transistors

Embodiments herein describe techniques for a semiconductor device including a three dimensional capacitor. The three dimensional capacitor includes a pole, and one or more capacitor units stacked around the pole. A capacitor unit of the one or more capacitor units includes a first electrode surrounding and coupled to the pole, a dielectric layer surrounding the first electrode, and a second electrode surrounding the dielectric layer. Other embodiments may be described and/or claimed.

Capacitor architectures in semiconductor devices

Embodiments disclosed herein include semiconductor devices with electrostatic discharge (ESD) protection of the transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate, where a transistor device is provided on the semiconductor substrate. In an embodiment, the semiconductor device further comprises a stack of routing layers over the semiconductor substrate, and a diode in the stack of routing layers. In an embodiment, the diode is configured to provide electrostatic discharge (ESD) protection to the transistor device.

ESD protection decoupled from diffusion

Integrated circuits with embedded memory that includes ferroelectric capacitors having first conductor structures coupled to an underlying array of access transistors, and second conductors coupled to independent plate lines that are shunted by a metal strap having a pitch similar to that of the capacitors. The independent plate lines may reduce bit-cell disturbs and/or simplify read/write process while the plate line straps reduce series resistance of the plate lines. The metal straps may be subtractively patterned lines in direct contact with the second capacitor conductors, or may be damascene structures coupled to the second capacitor conductors through vias that also have a pitch similar to that of the capacitors.

Embedded memory IC's with power supply droop circuitry coupled to ferroelectric capacitors

Described herein are three-dimensional memory arrays that include multiple layers of memory cells. The layers are stacked and bonded to each other at bonding interfaces. The layers are formed on a support structure, such as a semiconductor wafer, that is grinded down before the layers are bonded. Vias extend through multiple layers of memory cells, including through the support structures and bonding interfaces. Thinning the support structure enables a tighter via pitch, which reduces the portion of the footprint used for vias. The memory cells may include three-dimensional transistors with a recessed gate and extended channel length.

Vertically stacked and bonded memory arrays

IC devices with stacked backend memory with resistive switching devices are disclosed. An example IC device includes a support structure, a frontend layer with a plurality of frontend devices, and a backend layer with a plurality of resistive switching devices, the resistive switching devices being, e.g., part of memory cells of stacked backend memory. For example, the backend layer may implement stacked arrays of 1T-1RSD memory cells, with resistive switching devices coupled to some S/D regions of access transistors of the memory cells. Such memory cells may be used to implement stacked eMRAM or eRRAM, with access transistors being TFTs. Stacked TFT-based eMRAM or eRRAM as described herein may help increase density of MRAM or RRAM cells, hide the peripheral circuits that control the memory operation below the memory arrays, and address the scaling challenge of some conventional memory technologies.

Stacked backend memory with resistive switching devices

Microelectronic assemblies fabricated using hybrid manufacturing, as well as related devices and methods, are disclosed herein. As used herein, 'hybrid manufacturing' refers to fabricating a microelectronic assembly by arranging together at least two IC structures fabricated by different manufacturers, using different materials, or different manufacturing techniques. For example, a microelectronic assembly may include a first IC structure that includes first interconnects and a second IC structure that includes second interconnects, where at least some of the first and second interconnects may include a liner and an electrically conductive fill material, and where a material composition of the liner/electrically conductive fill material of the first interconnects may be different from a material composition of the liner/electrically conductive fill material of the second interconnects.

Hybrid manufacturing for integrated circuit devices and assemblies

Described herein are two transistor (2T) memory cells that use TFTs as access and gain transistors. When one or both transistors of a 2T memory cell are implemented as TFTs, these transistors may be provided in different layers above a substrate, enabling a stacked architecture. An example 2T memory cell includes an access TFT provided in a first layer over a substrate, and a gain TFT provided in a second layer over the substrate, the first layer being between the substrate and the second layer (i.e., the gain TFT is stacked in a layer above the access TFT). Stacked TFT based 2T memory cells allow increasing density of memory cells in a memory array having a given footprint area, or, conversely, reducing the footprint area of the memory array with a given memory cell density.

Two transistor memory cell using stacked thin-film transistors

Growing community of inventors

Hillsboro, OR, United States of America

Abhishek A Sharma