Most Cited Patents

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a cross-sectional view of a semiconductor device relating to the present invention.
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3,634 citations – Semiconductor device and manufacturing method thereof.

Date of patent: Jun. 08, 2010

Inventors: Kengo Akimoto, Tatsuya Honda, Norihito Sone.

The goal is to create a cost-effective semiconductor device using a simplified manufacturing process. This involves forming a thin film transistor with an oxide semiconductor film (such as zinc oxide). The steps include forming a gate electrode, a gate-insulating film, and an oxide semiconductor film on a substrate. Finally, the first and second conductive films are applied over the oxide semiconductor film. The oxide semiconductor film contains a crystallized region in the channel area.


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illustrates an embodiment of an active matrix display area.
3,619 citations – Semiconductor device.
Date of Patent: Nov. 20, 2007

Inventors: Randy L. Hoffman, Gregory S. Herman, Peter P. Mardilovich.

The semiconductor device includes a channel made of a metal oxide, which can be zinc-gallium, cadmium-gallium, or cadmium-indium.

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