The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2023

Filed:

Mar. 27, 2017
Applicant:

Everspin Technologies, Inc., Chandler, AZ (US);

Inventors:

Phillip Mather, Phoenix, AZ (US);

Jon Slaughter, Chandler, AZ (US);

Nicholas Rizzo, Gilbert, AZ (US);

Assignee:

EVERSPIN TECHNOLOGIES, INC., Chandler, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2005.12); H01L 27/22 (2005.12); B82Y 25/00 (2010.12); G01R 33/09 (2005.12); H01L 43/08 (2005.12);
U.S. Cl.
CPC ...
H01L 27/22 (2012.12); B82Y 25/00 (2012.12); G01R 33/093 (2012.12); H01L 43/08 (2012.12);
Abstract

Three bridge circuits (), each include magnetoresistive sensors coupled as a Wheatstone bridge () to sense a magnetic field () in three orthogonal directions () that are set with a single pinning material deposition and bulk wafer setting procedure. One of the three bridge circuits () includes a first magnetoresistive sensor () comprising a first sensing element () disposed on a pinned layer (), the first sensing element () having first and second edges and first and second sides, and a first flux guide () disposed non-parallel to the first side of the substrate and having an end that is proximate to the first edge and on the first side of the first sensing element (). An optional second flux guide () may be disposed non-parallel to the first side of the substrate and having an end that is proximate to the second edge and the second side of the first sensing element ().


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