The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2019

Filed:

Feb. 19, 2015
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Markus Zundel, Egmating, DE;

Franz Hirler, Isen, DE;

Armin Willmeroth, Augsburg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2005.12); H01L 29/10 (2005.12); H01L 29/06 (2005.12); H01L 29/08 (2005.12);
U.S. Cl.
CPC ...
H01L 29/7813 (2012.12); H01L 29/0634 (2012.12); H01L 29/0878 (2012.12); H01L 29/1095 (2012.12);
Abstract

A power semiconductor element having a lightly doped drift and buffer layer is disclosed. One embodiment has, underneath and between deep well regions of a first conductivity type, a lightly doped drift and buffer layer of a second conductivity type. The drift and buffer layer has a minimum vertical extension between a drain contact layer on the adjacent surface of a semiconductor substrate and the bottom of the deepest well region which is at least equal to a minimum lateral distance between the deep well regions. The vertical extension can also be determined such that a total amount of dopant per unit area in the drift and buffer layer is larger than a breakdown charge amount at breakdown voltage.


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