The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2019
Filed:
Jul. 01, 2015
Applicant:
Ps4 Luxco S.a.r.l., Luxembourg, LU;
Inventor:
Takeshi Ohgami, Tokyo, JP;
Assignee:
LONGITUDE LICENSING LIMITED, Dublin, IE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11C 16/04 (2005.12); H01L 27/02 (2005.12); H01L 27/108 (2005.12); G11C 5/06 (2005.12);
U.S. Cl.
CPC ...
H01L 27/0207 (2012.12); G11C 5/063 (2012.12); H01L 27/10882 (2012.12); H01L 27/10891 (2012.12); H01L 27/10894 (2012.12); H01L 27/10897 (2012.12);
Abstract
A plurality of contact plugs to be connected to a drain region or a source region of each of transistors constituting a sub-word line driver that drives a sub-word line are formed, by using a SAC line technique of selectively etching an insulation layer that covers each of the transistors by using a mask having line-shaped openings provided across a portion in which the contact plugs of each of the transistors are to be formed.