The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2018

Filed:

Jun. 15, 2017
Applicant:

Nordson Corporation, Westlake, OH (US);

Inventors:

Alec Babiarz, Encinitas, CA (US);

Stephane Etienne, Bouaye, FR;

Owen Yikon Sit, Ladera Ranch, CA (US);

Assignee:

Nordson Corporation, Westlake, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2005.12); H01L 21/66 (2005.12); G01N 21/95 (2005.12); H01L 21/56 (2005.12);
U.S. Cl.
CPC ...
H01L 22/30 (2012.12); G01N 21/95 (2012.12); H01L 21/563 (2012.12);
Abstract

Systems and methods for automated inspection of fillet formation along on or more peripheral edges (a) of a packaged microelectronic device () that is attached to a supporting substrate (), such system () including a feedback loop for controlling fillet formation. More specifically, the system () includes a dispensing system () configured for dispensing underfill material () onto the supporting substrate (). The system () further includes an automated optical inspection (AOI) system () configured for determining a value of a measurable attribute of the fillet (), such as whether the fillet () is properly dimensioned, i.e., sized and shaped. A feedback loop () is included between the dispensing system () and automated optical inspection system (). The feedback loop () is configured to communicate information from the AOI system () to the dispensing system () to permit adjustment of one or more operating parameters thereof, thereby maintaining proper dimensions of the fillet ().


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