The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2016
Filed:
Mar. 07, 2013
Momentive Performance Materials Inc., Waterford, NY (US);
John Mariner, Avon Lake, OH (US);
Ajit Sane, Essex Junction, VT (US);
Toshiki Ebata, Osaka, JP;
Marc Schaepkens, Clifton Park, NY (US);
Xiang Liu, Medina, OH (US);
Wei Fan, Strongsville, OH (US);
MOMENTIVE PERFORMANCE MATERIALS, Waterford, NY (US);
Abstract
A heating apparatus for regulating/controlling the surface temperature of a substrate is provided. At least a thermal pyrolytic graphite (TPG) layer is embedded in the heater to diffuse the temperature difference of the various components in the heating apparatus and provide temporal and spatial control of the surface temperature of the substrate, for a relatively uniform substrate temperature with the difference between the maximum and minimum temperature points on the substrate of less than 10° C.