The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2010
Filed:
Nov. 29, 2006
Tatsuhiro Sato, Koriyama, JP;
Nobumasa Yoshida, Koriyama, JP;
Akira Fujinoki, Koriyama, JP;
Kyoichi Inaki, Tokorozawa, JP;
Tomoyuki Shirai, Shiga, JP;
Tatsuhiro Sato, Koriyama, JP;
Nobumasa Yoshida, Koriyama, JP;
Akira Fujinoki, Koriyama, JP;
Kyoichi Inaki, Tokorozawa, JP;
Tomoyuki Shirai, Shiga, JP;
Heraeus Quarzglas GmbH & Co. KG, Hanau, DE;
Shin-Etsu Quartz Products Co., Ltd., Tokyo, JP;
Abstract
An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mmper 100 cm.