The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2009
Filed:
Sep. 16, 2003
Masumi Suetsugu, Toyonaka, JP;
Takehiro Kusumoto, Osaka, JP;
Naoki Takeyama, Saga, JP;
Masanori Shinada, Ibaraki, JP;
Masumi Suetsugu, Toyonaka, JP;
Takehiro Kusumoto, Osaka, JP;
Naoki Takeyama, Saga, JP;
Masanori Shinada, Ibaraki, JP;
Sumitomo Chemical Company, Limited, Osaka, JP;
Abstract
A negative type resist composition is provided, which provides excellent resolution, satisfactory profile and outstanding process stability; is suitable for exposure using deep ultra violet ray; and comprises alkali soluble resin, acid generator, crosslinking agent, and a basic compound represented by the following formula (I)wherein, A representssulfide group, disulfide group orbivalent aliphatic hydrocarbon residue which may be optionally interrupted by imino group,sulfide group, or disulfide group,X represents nitrogen atom or C(NH), and Rand Rindependently represent hydrogen or alkyl.