The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2008
Filed:
Aug. 13, 2003
Applicants:
Hideaki Mitsutake, Yokohama, JP;
Shinichi Kawate, Sagamihara, JP;
Naoto Nakamura, Isehara, JP;
Yoshihisa Sano, Ebina, JP;
Inventors:
Hideaki Mitsutake, Yokohama, JP;
Shinichi Kawate, Sagamihara, JP;
Naoto Nakamura, Isehara, JP;
Yoshihisa Sano, Ebina, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 19/42 (2005.12);
U.S. Cl.
CPC ...
Abstract
An electron beam apparatus includes an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer arranged between the electron source and the electrode. The spacer has a semiconductor film on the surface thereof that is electrically connected to the electron source and the electrode.