The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 17, 2007

Filed:

Jun. 02, 1999
Applicants:

Osamu Tanitsu, Funabashi, JP;

Takashi Mori, Fujisawa, JP;

Noriaki Yamamoto, Yokohama, JP;

Inventors:

Osamu Tanitsu, Funabashi, JP;

Takashi Mori, Fujisawa, JP;

Noriaki Yamamoto, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2005.12); G03B 27/42 (2005.12); G02B 27/08 (2005.12); H01L 21/027 (2005.12);
U.S. Cl.
CPC ...
Abstract

An illumination optical apparatus for illuminating an object to be illuminated in an arcuate or rectangular shape. A first optical integrator forms a plurality of light source images in a substantially linear arrangement, based on a beam of parallel rays. Then a second optical integrator forms a plurality of light source images in a substantially square arrangement, based on the beam from the first optical integrator. A relay optical system is disposed between the first and second optical integrator, and makes a position of the light source images formed by the first optical cintegrator conjugate with a position of the light source images formed by the second optical integrator.


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