The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2007
Filed:
Apr. 20, 2003
Tetsuya Fujikawa, Kawasaki, JP;
Hidetoshi Sukenori, Kawasaki, JP;
Shougo Hayashi, Kawasaki, JP;
Yoshinori Tanaka, Kawasaki, JP;
Masahiro Kihara, Kawasaki, JP;
Tetsuya Fujikawa, Kawasaki, JP;
Hidetoshi Sukenori, Kawasaki, JP;
Shougo Hayashi, Kawasaki, JP;
Yoshinori Tanaka, Kawasaki, JP;
Masahiro Kihara, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A conductive film made of Al or alloy containing Al as a main component is formed on an underlying substrate. An upper conductive film is disposed on the conductive film. A first opening is formed through the upper conductive film. An insulating film is disposed on the upper conductive film A second opening is formed through the insulating film. An inner wall of the second opening is retreated from an inner wall of the first opening. An ITO film is formed covering a partial upper surface of the insulating film and inner surfaces of the first and second openings, and contacting a partial upper surface of the upper conductive film at a region inside of the second opening. Good electrical contact between an Al or Al alloy film and an ITO film can be established and productivity can be improved.