The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2006
Filed:
Dec. 13, 2001
Applicants:
Philip D. Floyd, Redwood City, CA (US);
Decai Sun, Los Altos, CA (US);
Joel A. Kubby, Rochester, NY (US);
Inventors:
Philip D. Floyd, Redwood City, CA (US);
Decai Sun, Los Altos, CA (US);
Joel A. Kubby, Rochester, NY (US);
Assignee:
Xerox Corporation, Stamford, CT (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2005.12);
U.S. Cl.
CPC ...
Abstract
A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.