The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2018
Filed:
Jan. 20, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Yun-Seok Choi, Hwaseong-si, KR;
Chang-Gil Ryu, Yongin-si, KR;
Geun-Young Song, Suwon-si, KR;
Ki-Yeon Chu, Hwaseong-si, KR;
Jin-Suk Hong, Hwaseong-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/32 (2012.01); B24B 55/02 (2006.01); B24B 37/30 (2012.01);
U.S. Cl.
CPC ...
B24B 37/32 (2013.01); B24B 37/30 (2013.01); B24B 55/02 (2013.01);
Abstract
A polishing head includes a substrate carrier to suck and to pressurize a substrate, and a retainer ring secured under the substrate carrier, the retainer ring surrounding a circumference of the substrate and including a cooling channel therethrough to circulate a coolant fluid.