The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2018

Filed:

Dec. 13, 2013
Applicant:

General Electric Company, Schenectady, NY (US);

Inventors:

Russell Craddock, Leicsetershire, GB;

Roger Jones, Leicestershire, GB;

Li Zhao, Leicestershire, GB;

Muhammad Irshad, Leicestershire, GB;

Assignee:

General Electric Company, Schenectady, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/10 (2006.01); H03H 9/02 (2006.01); G01L 9/00 (2006.01); G01L 19/00 (2006.01); G01L 19/04 (2006.01); G01K 7/32 (2006.01); G01P 15/02 (2013.01); H03H 3/007 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02244 (2013.01); G01K 7/32 (2013.01); G01L 1/103 (2013.01); G01L 9/002 (2013.01); G01L 9/0077 (2013.01); G01L 19/0092 (2013.01); G01L 19/04 (2013.01); G01P 15/02 (2013.01); H03H 3/0072 (2013.01); H03H 3/02 (2013.01);
Abstract

A resonator deviceis disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonatorprovided on a diaphragm. A capis provided which may be fusion bonded to the diaphragmto enclose the resonatorand form a hermetically sealed package. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fiber. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonatorand the inside surface of the capto derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.


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