The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Apr. 22, 2015
Applicant:
Murata Machinery, Ltd., Kyoto, JP;
Inventors:
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/67386 (2013.01); H01L 21/67766 (2013.01);
Abstract
A purge device configured to purge the inside of a storage container storing a product with purge gas includes a plurality of placing units, each configured to place the storage container thereon, a plurality of supply pipes configured to supply purge gas to the storage container placed on the corresponding placing unit, a main pipe connected to the supply pipes and configured to supply the purge gas to the supply pipes, and an MFC configured to adjust the flow rate of the purge gas in the main pipe.