The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Mar. 23, 2011
Ryuji Higashisaka, Kawasaki, JP;
Hideki Wakabayashi, Tokyo, JP;
Ryuji Higashisaka, Kawasaki, JP;
Hideki Wakabayashi, Tokyo, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms () that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism () that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.