The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2018

Filed:

Jul. 11, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Takahiko Yoshizawa, Sakata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3105 (2006.01); B81C 1/00 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31053 (2013.01); B81C 1/00293 (2013.01); B81B 2201/0271 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0145 (2013.01); H01L 23/53214 (2013.01);
Abstract

An electronic apparatus according to the invention includes a substrate, a side wall that is disposed directly on the substrate or via an insulation film and forms a hollow, a functional element that is disposed within the hollow, a first layer that is disposed on the side wall so as to cover the hollow and has a first through hole that communicates with the hollow, a second layer that is disposed on the first layer so as to cover the hollow and has a second through hole that has a diameter smaller than a diameter of the first through hole and at least partially overlaps the first through hole as viewed in plan view, and a third layer that is disposed on the second layer so as to seal at least the second through hole.


Find Patent Forward Citations

Loading…