The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Sep. 15, 2015
Sumitomo Chemical Company, Limited, Tokyo, JP;
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Abstract
A resist composition includes (A1) a resin which includes a structural unit represented by formula (a4), a structural unit having a cyclic carbonate and a structural unit represented by formula (I), the resin has no acid-labile group; (A2) a resin which has an acid-labile group; and an acid generator: wherein Rrepresents a hydrogen atom or a methyl group, Rrepresents a Cto Csaturated hydrocarbon group having a fluorine atom, and a methylene group contained in the saturated hydrocarbon group may be replaced by an oxygen atom or a carbonyl group, Rrepresents a hydrogen atom or a methyl group, and Lrepresents a single bond or a Cto Cdivalent saturated hydrocarbon group where a methylene group may be replaced by an oxygen atom or a carbonyl group, and Rrepresents a Cto Calicyclic hydrocarbon group where a hydrogen atom may be replaced by a Cto Caliphatic hydrocarbon group or a hydroxy group, provided that the carbon atom directly bonded to Lhas no aliphatic hydrocarbon group by which a hydrogen atom has been replaced.