The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Sep. 28, 2015
The University of Tokyo, Tokyo, JP;
Seiko Instruments Inc., Chiba-shi, Chiba, JP;
Isao Shimoyama, Tokyo, JP;
Kiyoshi Matsumoto, Tokyo, JP;
Hidetoshi Takahashi, Tokyo, JP;
Minh-Dung Nguyen, Tokyo, JP;
Takeshi Uchiyama, Chiba, JP;
Manabu Oumi, Chiba, JP;
Yoko Shinohara, Chiba, JP;
Masayuki Suda, Chiba, JP;
THE UNIVERSITY OF TOKYO, Tokyo, JP;
SEIKO INSTRUMENTS INC., Chiba-shi, JP;
Abstract
A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.