The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2018
Filed:
Mar. 24, 2015
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Lian Guo, Croton-on-Hudson, NY (US);
Shu-Jen Han, Cortlandt Manor, NY (US);
Xuesong Li, Yorktown Heights, NY (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/02 (2006.01); C25F 7/00 (2006.01); B32B 38/10 (2006.01); C25F 5/00 (2006.01); B32B 37/24 (2006.01); C01B 32/186 (2017.01);
U.S. Cl.
CPC ...
C25F 3/02 (2013.01); B32B 38/10 (2013.01); C25F 5/00 (2013.01); C25F 7/00 (2013.01); B32B 2037/246 (2013.01); B32B 2307/202 (2013.01); B32B 2311/02 (2013.01); B32B 2457/14 (2013.01); C01B 32/186 (2017.08);
Abstract
An electroplating etching apparatus includes a power to output current, and a container configured to contain an electrolyte. A cathode is coupled to the container and configured to fluidly communicate with the electrolyte. An anode is electrically connected to the output, and includes a graphene layer. A metal substrate layer is formed on the graphene layer, and is etched from the graphene layer in response to the current flowing through the anode.