The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 12, 2018

Filed:

Jan. 31, 2013
Applicant:

Kabushiki Kaisha Atsumitec, Shizuoka, JP;

Inventors:

Naoki Uchiyama, Shizuoka, JP;

Tomomi Kanai, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 1/12 (2006.01); B05D 1/36 (2006.01); C23C 14/24 (2006.01); C23C 14/28 (2006.01); C23C 14/56 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
B05D 1/12 (2013.01); B05D 1/36 (2013.01); C23C 14/228 (2013.01); C23C 14/24 (2013.01); C23C 14/28 (2013.01); C23C 14/56 (2013.01); C23C 14/562 (2013.01);
Abstract

A particulate film laminating system includes: a nanoparticle generating chamber in which nanoparticles of a metal material are generated; a nanofiber generating chamber in which nanofibers of a resin material are generated; a laminating chamber in which the nanoparticles and the nanofibers are film-formed and laminated on a substrate; a nanoparticle film-forming region configured such that the nanoparticles are film-formed in the laminating chamber; a nanofiber film-forming region configured such that the nanofibers are film-formed in the laminating chamber; a moving unit which moves the substrate between the nanoparticle film-forming region and the nanofiber film-forming region; an exhaust unit which exhausts the laminating chamber; and a coolant-gas introduction unit which introduces coolant gas into each of the nanoparticle generating chamber and the nanofiber generating chamber.


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