The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Apr. 06, 2015
Rf Micro Devices, Inc., Greensboro, NC (US);
Kushal Bhattacharjee, Kernersville, NC (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
A MEMS device includes a substrate, at least one anchor on a surface of the substrate, and a vibrating body suspended over the substrate by the at least one anchor. The vibrating body includes a periodically poled piezoelectric thin-film layer, a first conductive layer, a second conductive layer, and a functional layer. The first conductive layer is on a first surface of the vibrating body opposite the surface of the substrate. The second conductive layer is on a second surface of the vibrating body opposite the first surface. The functional layer is over the first conductive layer. By including the functional layer over the first conductive layer, functionality may be added to the MEMS device, thereby increasing the utility thereof.