The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Apr. 07, 2015
Applicant:
Hrl Laboratories Llc, Malibu, CA (US);
Inventors:
Randall L. Kubena, Oak Park, CA (US);
Deborah J. Kirby, Calabasas, CA (US);
David T. Chang, Calabasas, CA (US);
Assignee:
HRL Laboratories, LLC, Malibu, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/19 (2006.01); H03H 3/007 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/0076 (2013.01); H03H 9/19 (2013.01); H03H 2003/027 (2013.01);
Abstract
A piezoelectric quartz shear-mode resonator includes plasma etched quartz tethers, each including a mount. The tethers are for mounting the resonator to a semiconductor substrate for the purpose of isolating the thermally-induced stress from the mounts from the active resonating region, wherein the quartz tethers have rounded corners.