The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2018

Filed:

Jul. 13, 2016
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Christoph Andreas Othmar Dirnecker, Eching, DE;

Wolfgang Schwartz, Au, DE;

Doug Weiser, Plano, TX (US);

Joel Martin Halbert, Tucson, AZ (US);

Joseph Anthony DeSantis, Gilroy, CA (US);

Karsten Jens Spinger, Ingolstadt, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 21/3205 (2006.01); H01L 21/768 (2006.01); H01L 21/3213 (2006.01); H01L 21/027 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
H01L 28/24 (2013.01); H01L 21/0273 (2013.01); H01L 21/268 (2013.01); H01L 21/32051 (2013.01); H01L 21/32139 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/5228 (2013.01);
Abstract

An integrated circuit includes a higher sheet resistance resistor and a lower sheet resistance resistor, disposed in a same level of dielectric layers of the integrated circuit. The higher sheet resistor has a body region and head regions in a higher sheet resistance layer. The lower sheet resistor has a body region and head regions in a lower sheet resistance layer, which is thicker than the higher sheet layer. The higher sheet resistor has an upper head layer contacting the higher sheet layer at each head region of the higher sheet layer. Each upper head layer has a same composition and thickness as the lower sheet layer of the lower sheet resistor. The lower sheet resistor is free of head layers over the lower sheet resistance layer.


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