The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2018

Filed:

Nov. 12, 2015
Applicant:

Seagate Technology Llc, Cupertino, CA (US);

Inventors:

Samuel Lewis Tanaka, Fremont, CA (US);

Christopher L. Platt, Fremont, CA (US);

Thomas Larson Greenberg, Berkeley, CA (US);

Assignee:

SEAGATE TECHNOLOGY LLC, Cupertino, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01K 1/18 (2006.01); C23C 16/26 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32568 (2013.01); C23C 16/26 (2013.01); C23C 16/50 (2013.01); H01J 37/3233 (2013.01); H01J 37/3244 (2013.01); H01J 37/32403 (2013.01); H01J 37/32449 (2013.01); H01K 1/18 (2013.01); H01J 2237/032 (2013.01); H01J 2237/3321 (2013.01);
Abstract

A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.


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