The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Apr. 04, 2017
Applicant:
Carl Zeiss Ag, Oberkochen, DE;
Inventors:
Philipp Huebner, Hamburg, DE;
Gerhard Krampert, Jena, DE;
Stefan Richter, Jena, DE;
Timo Mappes, Karlsruhe, DE;
Assignee:
Carl Zeiss AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70383 (2013.01); G03F 7/70683 (2013.01); G03F 9/7007 (2013.01); G03F 9/7011 (2013.01);
Abstract
An optical system for producing lithographic structures is disclosed. Also disclosed is a method for determining relative coordinates of a position of a writing field relative to a position of a preview field in such an optical system, and a method for producing lithographic structures using such an optical system.