The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2018

Filed:

Jul. 01, 2014
Applicant:

Toray Industries, Inc., Tokyo, JP;

Inventors:

Keiichi Uchida, Otsu, JP;

Masao Kamogawa, Otsu, JP;

Mitsuhito Suwa, Otsu, JP;

Chika Taniguchi, Otsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/023 (2006.01); G03F 7/075 (2006.01); G03F 7/039 (2006.01); G03F 7/22 (2006.01); H01L 21/02 (2006.01); H01L 27/146 (2006.01); C08G 77/14 (2006.01); C09D 183/06 (2006.01); H01L 21/311 (2006.01); G03F 7/022 (2006.01); H01L 21/027 (2006.01); G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C08G 77/14 (2013.01); C09D 183/06 (2013.01); G03F 7/0047 (2013.01); G03F 7/022 (2013.01); G03F 7/023 (2013.01); G03F 7/0233 (2013.01); G03F 7/039 (2013.01); H01L 21/0274 (2013.01); H01L 21/02126 (2013.01); H01L 21/02282 (2013.01); H01L 21/311 (2013.01); H01L 27/1462 (2013.01); H01L 27/14621 (2013.01); H01L 27/14627 (2013.01);
Abstract

A positive photosensitive resin composition including: a polysiloxane synthesized by hydrolyzing and partially condensing a specific organosilane and an organosilane that has a carboxyl group and/or a dicarboxylic acid anhydride structure; particles of one or more metal compounds selected from an aluminum compound, a tin compound, a titanium compound, and a zirconium compound, or composite particles of a silicon compound and one or more metal compounds selected from an aluminum compound, a tin compound, a titanium compound, and a zirconium compound; a naphthoquinone diazide compound; and a solvent.


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