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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9989467 B1

PDFFull Text
Date of Patent:
Jun. 05, 2018

Filed:

Feb. 14, 2017

Cointegration of optical waveguides, microfluidics, and electronics on sapphire substrates

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Yann A. N. Astier, Irvington, NY (US);

Ning Li, White Plains, NY (US);

Devendra K. Sadana, Pleasantville, NY (US);

Joshua T. Smith, Croton on Hudson, NY (US);

William T. Spratt, Westchester, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Scully, Scott, Murphy & Presser, P.C.

Louis J. Percello, Esq.

Primary Examiner:

Robert Carpenter

Int. Cl.
CPC ...
H01L 31/16 (2006.01); G01N 21/64 (2006.01); G02B 6/132 (2006.01); H01L 33/32 (2010.01); G02B 6/122 (2006.01); G02B 6/12 (2006.01); H01L 33/00 (2010.01); H01L 31/0304 (2006.01); H01L 27/14 (2006.01); H01L 27/15 (2006.01);
U.S. Cl.
CPC ...
G01N 21/6454 (2013.01); G01N 21/6428 (2013.01); G02B 6/122 (2013.01); G02B 6/12004 (2013.01); H01L 31/03044 (2013.01); H01L 31/16 (2013.01); H01L 33/007 (2013.01); H01L 33/32 (2013.01); G01N 2021/6439 (2013.01); G01N 2021/6482 (2013.01); G01N 2201/0873 (2013.01); G02B 2006/12038 (2013.01); G02B 2006/12078 (2013.01); G02B 2006/12123 (2013.01); H01L 27/14 (2013.01); H01L 27/15 (2013.01);
Abstract

A semiconductor structure includes a first optical waveguide and a second optical waveguide located on a sapphire substrate. The first optical waveguide and the second optical waveguide each include a core portion of gallium nitride (GaN), and a cladding layer laterally surrounding the core portion. The cladding layer includes a material having a refractive index less than a refractive index of the sapphire substrate.

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