The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2018
Filed:
Oct. 10, 2014
Shin-etsu Chemical Co., Ltd., Chiyoda-ku, Tokyo, JP;
Naoto Fujimura, Yokohama, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
To provide a superheated steam treatment apparatus capable of efficiently treating an object by superheated steam containing a high concentration of hydroxyl radicals. The superheated steam treatment apparatus includes an induction heating unitconfigured to generate superheated steam by induction heating saturated stream, a treatment chamberconfigured to allow the superheated steam generated by the induction heating unitto be introduced thereinto, and a discharge treatment unitlocated in the treatment chamberand configured to treat the introduced superheated steam by discharge. The discharge treatment unithas a frame serving as a support for the discharge treatment unit, a discharge electrode located at an upper part of the frame, a mesh-like opposite electrode located below the discharge electrode, and a high-frequency power source configured to supply high-frequency, high-voltage power between the discharge electrode and the opposite electrode to cause the discharge, whereby an object immediately below the opposite electrode is allowed to be treated by the superheated steam having an increased hydroxyl radical concentration due to the discharge.