The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2018

Filed:

Jul. 01, 2014
Applicant:

Tel Nexx, Inc., Billerica, MA (US);

Inventors:

Demetrius Papapanayiotou, Westford, MA (US);

Arthur Keigler, Wellesley, MA (US);

Jonathan Hander, Westford, MA (US);

Johannes Chiu, Bedford, MA (US);

David G. Guarnaccia, Carlisle, MA (US);

Daniel L. Goodman, Lexington, MA (US);

Assignee:

TEL NEXX, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B 15/08 (2006.01); C25B 15/02 (2006.01); C25B 9/18 (2006.01); C25D 17/02 (2006.01); C25D 21/14 (2006.01); C25D 7/12 (2006.01); C25D 21/18 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
C25D 21/14 (2013.01); C25D 7/12 (2013.01); C25D 17/00 (2013.01); C25D 17/001 (2013.01); C25D 17/002 (2013.01); C25D 21/18 (2013.01);
Abstract

An electrochemical deposition system is described. The electrochemical deposition system includes one or more electrochemical deposition modules arranged on a common platform for depositing one or more metals on a substrate, and a chemical management system coupled to the one or more electrochemical deposition modules. The chemical management system is configured to supply at least one of the one or more electrochemical deposition modules with one or more metal constituents for depositing the one or more metals. The chemical management system can include at least one metal enrichment cell and at least one metal-concentrate generator cell.


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