The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Jun. 12, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Matthew Busche, Santa Clara, CA (US);
Wendell Boyd, Jr., Morgan Hill, CA (US);
Dmitry A. Dzilno, Sunnyvale, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Leon Volfovski, Pacifica, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Substrate temperature control apparatus including groove-routed optical fibers. Substrate temperature control apparatus includes upper and lower members including grooves in one or both, and a plurality of optical fibers routed in the grooves. In one embodiment, the optical fibers are adapted to provide light-based pixelated heating. In another embodiment, embedded optical temperature sensors are adapted to provide temperature measurement. Substrate temperature control systems, electronic device processing systems, and methods including groove-routed optical fiber temperature control and measurement are described, as are numerous other aspects.