The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Nov. 15, 2016
Applicant:
Japan Display Inc., Tokyo, JP;
Inventor:
Keisuke Ono, Tokyo, JP;
Assignee:
Japan Display Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/52 (2006.01); H01L 51/56 (2006.01); C23C 14/04 (2006.01); C23C 14/08 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); H01L 51/00 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); C23C 14/04 (2013.01); C23C 14/044 (2013.01); C23C 14/086 (2013.01); C23C 14/35 (2013.01); C23C 14/50 (2013.01); H01L 51/0021 (2013.01); H01L 51/5253 (2013.01); H01L 27/3244 (2013.01); H01L 51/5203 (2013.01); H01L 51/5234 (2013.01); H01L 2227/323 (2013.01); H01L 2251/305 (2013.01); H01L 2251/558 (2013.01);
Abstract
A manufacturing method of a display device is provided. The manufacturing method includes: forming a first electrode over a substrate; forming an organic layer over the first electrode; and forming a second electrode over the organic layer by sputtering a target including a conductive oxide with a light-transmitting property. A mask is arranged between the organic layer and the target when the second electrode is formed. The mask has periodically arranged through holes with a maximum width equal to or larger than 0.1 μm and equal to or smaller than 3 μm.