The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2018

Filed:

Jul. 08, 2015
Applicant:

Newport Fab, Llc, Newport Beach, CA (US);

Inventors:

David J. Howard, Irvine, CA (US);

Hadi Jebory, Irvine, CA (US);

Assignee:

Newport Fab, LLC, Newport Beach, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 21/304 (2006.01); H01L 23/00 (2006.01); H01L 21/66 (2006.01); H01L 21/768 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
H01L 21/304 (2013.01); H01L 21/486 (2013.01); H01L 21/76898 (2013.01); H01L 22/26 (2013.01); H01L 23/49827 (2013.01); H01L 23/564 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A semiconductor wafer having a plurality of through substrate vias (TSVs) is disclosed. The semiconductor wafer includes a stepped support ring on an outer edge of the semiconductor wafer, a usable back side region of the semiconductor wafer substantially enclosed by the stepped support ring, and the plurality of TSVs extending from a front side of the semiconductor wafer to the usable back side region of the semiconductor wafer. The stepped support ring includes a step between an outer ring and an inner ring of the stepped support ring. The semiconductor wafer further includes a back side metal on the usable back side region of the semiconductor wafer, a plurality of semiconductor devices on the front side of the semiconductor wafer, where at least one of the plurality of semiconductor devices is coupled to the back side metal through at least one of the plurality of TSVs.


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