The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Oct. 11, 2013
Applicant:
Trustees of Boston University, Boston, MA (US);
Inventors:
Abdulkadir Yurt, Brighton, MA (US);
Selim M. Unlu, Boston, MA (US);
Bennett B. Goldberg, Newton, MA (US);
Euan Ramsay, Dublin, CA (US);
Assignee:
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE, Washington, DC (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G01R 31/311 (2006.01); G01R 31/26 (2014.01); G01R 1/07 (2006.01); G01N 21/17 (2006.01); G01N 21/41 (2006.01); G01B 9/02 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/311 (2013.01); G01B 9/02001 (2013.01); G01N 21/1717 (2013.01); G01N 21/41 (2013.01); G01R 1/071 (2013.01); G01R 31/26 (2013.01); G01R 31/2601 (2013.01); G01R 31/2851 (2013.01); G01N 2021/1719 (2013.01);
Abstract
A dual-phase interferometric method and device for charge modulation mapping in integrated circuits provides significant improvement in signal to noise ratio over conventional detection configurations. The method and device can be used for failure analysis and testing of advanced technology IC chips for which high sensitivity in modulation mapping is required.