The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Jan. 04, 2016
Northrop Grumman Litef Gmbh, Freiburg, DE;
Peter Leinfelder, Ehrenkirchen, DE;
Northrop Grumman Litef GmbH, , DE;
Abstract
The invention relates to an acceleration sensor () comprising an excitation mass () having excitation electrodes (), which excitation mass is movably mounted over a substrate () along a movement axis (x) and comprising detection electrodes () which are permanently connected to the substrate () and allocated to the excitation electrodes (). A first group of pairings () of excitation electrode () and allocated detection electrodes () is suitable for deflecting the excitation mass () along the movement axis (x) in a first direction (). A second group of pairings () of excitation electrodes () and allocated detection electrodes () is suitable for deflecting the excitation mass () along the movement axis (x) in a second direction (), which is opposite the first direction (). The number of pairings () in the first group is equal to the number of pairings () in the second group. The averaged distance between excitation electrodes () and detection electrodes () of the pairings () of the first group corresponds to the averaged distance between excitation electrodes () and detection electrodes () of the pairings () of the second group.