The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2018

Filed:

May. 29, 2015
Applicant:

Agilent Technologies, Inc., Loveland, CO (US);

Inventor:

Ronald J. Forni, Lexington, MA (US);

Assignee:

Agilient Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 41/06 (2006.01); F04B 43/02 (2006.01); F04C 29/12 (2006.01); F04C 23/00 (2006.01); F04B 23/12 (2006.01); F04B 37/14 (2006.01); F04C 25/02 (2006.01); F04C 18/02 (2006.01);
U.S. Cl.
CPC ...
F04B 41/06 (2013.01); F04B 23/12 (2013.01); F04B 37/14 (2013.01); F04B 43/02 (2013.01); F04C 18/0215 (2013.01); F04C 23/005 (2013.01); F04C 25/02 (2013.01); F04C 29/126 (2013.01); F04C 23/006 (2013.01);
Abstract

A vacuum pump system includes a secondary pumping mechanism incorporated into a stationary portion of a scroll pump. The stationary portion includes the stationary plate scroll of the scroll pump and defines a gas passageway in which the secondary pumping mechanism is disposed. The gas passageway is connected to a gas flow path through the scroll pump at a location upstream of an exhaust check valve of the scroll pump. The secondary pumping mechanism is displaceable within the gas passageway to draw residual gas in the compression stage upstream of the check valve into the gas passageway, and may pump the residual gas back out through the exhaust check valve, to evacuate residual gas from the compression stage.


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