The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2018
Filed:
Mar. 08, 2016
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Jacob Huffman Woodruff, Scottsdale, AZ (US);
Michael Eugene Givens, Phoenix, AZ (US);
Bed Sharma, Gilbert, AZ (US);
Petri Räisänen, Gilbert, AZ (US);
Assignee:
ASM IP HOLDING B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/42 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
B05D 1/60 (2013.01); B05D 2203/30 (2013.01);
Abstract
Processes are provided for selectively depositing a metal silicide material on a first H-terminated surface of a substrate relative to a second, different surface of the same substrate. In some aspects, methods of forming a metal silicide contact layer for use in integrated circuit fabrication are provided.