The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
May. 13, 2015
Usound Gmbh, Graz, AT;
Andrea Rusconi Clerici, Hamburg, DE;
Ferruccio Bottoni, Graz, AT;
USOUND GMBH, Graz, AT;
Abstract
The invention relates to a MEMS loudspeaker () for generating sound waves in the audible wavelength spectrum, with a carrier substrate () that features a substrate cavity () with two substrate openings (), which are formed on two opposite sides of the carrier substrate (), an actuator structure (), in particular a piezoelectric actuator structure, which is arranged in the area of one of the two substrate openings () and is connected to the carrier substrate () in its edge area, and a membrane () anchored in its edge area, which, by means of the actuator structure (), can be set into vibration for generating sound waves. In accordance with the invention, in a cross-sectional view of the MEMS loudspeaker (), the membrane () is spaced at a distance from the actuator structure (), such that an intermediate cavity () is formed between these two. Furthermore, the MEMS loudspeaker () features a coupling element () arranged in the intermediate cavity (), which connects the actuator structure () to the membrane () and may vibrate with this with respect to the carrier substrate ().