The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Apr. 12, 2016
Applicant:
Industry-academic Cooperation Foundation, Yonsei University, Seoul, KR;
Inventors:
Hyun Jae Kim, Seoul, KR;
Young Jun Tak, Seoul, KR;
Si Joon Kim, Seoul, KR;
Seokhyun Yoon, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 29/22 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02631 (2013.01); H01L 21/02381 (2013.01); H01L 21/02472 (2013.01); H01L 21/02483 (2013.01); H01L 21/02488 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01); H01L 21/02658 (2013.01); H01L 21/02664 (2013.01); H01L 29/22 (2013.01); H01L 29/24 (2013.01);
Abstract
Disclosed is a method for repairing an oxide thin film, including repairing the oxide thin film by forming a repairing material that contains an oxide at a defect of the oxide thin film.