The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 2018

Filed:

Jan. 26, 2016
Applicant:

Pacesetter, Inc., Sunnyvale, CA (US);

Inventors:

Bruce A. Ribble, Easley, SC (US);

Ralph Jason Hemphill, Sunset, SC (US);

David R. Bowen, Taylors, SC (US);

Assignee:

PACESETTER, INC., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 17/00 (2006.01); H01G 9/055 (2006.01); H01G 9/045 (2006.01);
U.S. Cl.
CPC ...
H01G 9/055 (2013.01); H01G 9/045 (2013.01); Y10T 428/24917 (2015.01);
Abstract

A method for patterning a metal substrate includes a series of surface treatments to control tunnel initiation at a micron or sub-micron level. In particular, the series of surface treatments include forming a hydration layer which acts as a mask while etching the surface of the metal substrate. The hydration layer mask enables control of the tunnel initiation on a micron or sub-micron level because the etching does not undercut the interface between the metal substrate and the hydration layer. As a result, the tunnels can be initiated in an orthogonal direction and closer together, thereby increasing the tunnel density.


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