The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 2018

Filed:

May. 08, 2017
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kentaro Suzuki, Machida, JP;

Nobushige Korenaga, Utsunomiya, JP;

Satoshi Iwatani, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/58 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G03F 7/707 (2013.01);
Abstract

An apparatus for moving movable part on surface parallel to first and second directions includes single guide to constrain position of the movable part in the second direction and drive mechanism to drive the movable part. The movable part includes first movable member movable in the first direction while being guided by the guide, second movable member having first and second ends, the first end being connected to the first movable member via rotation bearing and moving above the surface, and third movable member movable within range between the first and second ends while being guided by the second movable member. The drive mechanism includes first driver to drive the first end of the second movable member in the first direction, and second driver to drive the second end of the second movable member in the first direction.


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