The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 22, 2018

Filed:

Jul. 24, 2015
Applicant:

King Abdulaziz University, Jeddah, SA;

Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/121 (2013.01);
Abstract

The method of making thin film humidity sensors uses thermal vapor deposition or drop casting techniques to fabricate nickel phthalocyanine-fullerene-based (NiPc-C) quick response humidity sensors with negligible hysteresis. Prior to the deposition of aluminum electrodes, a glass substrate is cleaned by using acetone in an ultrasonic bath for 10 minutes. After cleaning, the substrate is washed with de-ionized water and then dried. A gap is created between two electrodes by masking the glass substrate with copper wire. This assembly is plasma-cleaned for 5 minutes in a thermal evaporator. Subsequently aluminum (Al) thin films are deposited on the assembly. Next, a mixture of equal parts NiPc-Cis deposited onto the gap between the Al electrodes by thermal vapor deposition or by drop casting. A method of forming NiPc-graphene oxide (NiPc-GO) humidity sensors without using instrumentation drop casts an NiPc-GO suspension onto aluminum foil electrodes taped to a substrate.


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