The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Mar. 11, 2015
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventor:
Takeharu Motokawa, Kanagawa, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/23 (2006.01); G01N 21/41 (2006.01); B29C 35/02 (2006.01); G01N 21/45 (2006.01);
U.S. Cl.
CPC ...
G01N 21/23 (2013.01); G01N 21/45 (2013.01);
Abstract
A phase separation observation method according to one embodiment includes determining a progress degree of phase separation of a self-assembly material layer. The progress degree is determined based on the birefringence amount of an observation object. The observation object includes a substrate, and a self-assembly material layer formed on the substrate.
Motokawa, Takeharu. (2018). Phase separation observation method, phase separation observation apparatus, annealing apparatus, and producing method for substrate (U.S. Patent No. 9976948). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9976948
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile