The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 22, 2018
Filed:
Nov. 14, 2014
Endress + Hauser Gmbh + Co. KG, Maulburg, DE;
Martin Burgard, Schopfheim, DE;
Drewes Ulfert, Mullheim, DE;
Nils Ponath, Lorrach, DE;
Andreas Rossberg, Bad Sackingen, DE;
Thomas Uehlin, Schopfheim, DE;
Endress + Hauser GmbH + Co. KG, Hauptstr. 1, Maulburg, DE;
Abstract
A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body, a measurement membrane, which is arranged on the counter body and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode arranged on the measurement membrane and at least one counter-body electrode arranged on the counter body. The capacitance between the membrane electrode and the counter-body electrode depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode has a temperature-dependent impedance. The operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode—particularly, the ohmic portion of the impedance of the membrane electrode.